Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.

See also

Soft lithography

Nanolithography

Main	Optical Electron beam Nanoimprint Multi-Photon Scanning probe

Other	Molecular self-assembly Stencil X-ray Ion beam Magnetolithography Soft Laser printing Nanosphere Proton beam

See also	Nanotechnology Nanoelectronics

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